Nanofab Cleanroom: AJA ATC Orion Sputter System
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $35/hr
Non-Profit Fee: $54.80/hr
For Profit Fee: $175/hr
Rice Training Fee: $70/hr
Non-Profit Training Fee: $109.60/hr
For Profit Training Fee: $350/hr
Rice Consumable Fee: $15/use for PT or AU
Non-profit Consumable Fee: $23.50/use for PT or AU
For Profit Consumable Fee: $75/use for PT or AU
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
DESCRIPTION
AJA ATC Orion sputter system is a compact high vacuum sputtering system for physical vapor deposition. More information about the Cleanroom can be found here.
The system is equipped with 7 confocally-arranged 2” magnetron sputter guns and accommodates substrate sizes up to 100 mm wafer.
Multiple power supplies (2 DC and 1 RF) enable sputtering of metals, dielectrics, and magnetic materials.
Additional O2 and N2 gas feeds allow for reactive sputtering. Sputtering processes are computer controlled for precision film control.