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Nanofab Cleanroom: AJA ATC Orion Sputter System

Nanofab Cleanroom: AJA ATC Orion Sputter System

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $35/hr

Non-Profit Fee: $54.80/hr

For Profit Fee: $175/hr

Rice Training Fee: $70/hr

Non-Profit Training Fee: $109.60/hr

For Profit Training Fee: $350/hr

Rice Consumable Fee: $15/use for PT or AU

Non-profit Consumable Fee: $23.50/use for PT or AU

For Profit Consumable Fee: $75/use for PT or AU

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

 

DESCRIPTION

AJA ATC Orion sputter system is a compact high vacuum sputtering system for physical vapor deposition.
The system is equipped with 7 confocally-arranged 2” magnetron sputter guns and accommodates substrate sizes up to 100 mm wafer.
Multiple power supplies (2 DC and 1 RF) enable sputtering of metals, dielectrics, and magnetic materials.
Additional O2 and N2 gas feeds allow for reactive sputtering. Sputtering processes are computer controlled for precision film control.

More information about the Cleanroom can be found here.