Nanofab Cleanroom: Atomic Layer Deposition System (ALDS)
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $15/hr
Non-Profit Fee: $23.50/hr
For Profit Fee: $75/hr
Rice Training Fee: $30/hr
Non-Profit Training Fee: $47/hr
For Profit Training Fee: $150/hr
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
Faculty in Charge:
Rafael Verduzco (rafaelv@rice.edu)
DESCRIPTION
This Cambridge Ultratech Savannah 200 system can support a variety of ALD processes with a robust software interface and up to 5 modular precursor sources.
Currently supported processes include: Al2O3, HfO2, TiO2.
Additional processes will be considered based on demand, and users may wish to consider providing their own precursor for very specific applications. Please discuss any needed processes not listed with the cleanroom manager. More information about the Cleanroom can be found here.