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Plasma Cleaner

Nanofab Cleanroom: Benchtop RIE/Plasma Cleaner

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $10/hr

Non-Profit Fee: $15.65/hr

For Profit Fee: $50/hr

Rice Training Fee: $20/hr

Non-Profit Training Fee: $31.30/hr

For Profit Training Fee: $100/hr

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

Faculty in Charge:

Rafael Verduzco (rafaelv@rice.edu)

DESCRIPTION

The Plasma Etch PE-100 is a benchtop reactive ion etch system used for sample cleaning and surface activation. It can also be used for some etch processes. The adjustable process parameters include RF power, gas flow, and time. Available process gases include O2, Ar, N2, CF4, and SF6.