Nanofab Cleanroom: Dektak XT Stylus Profilometer
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $8/hr
Non-Profit Fee: $12.60/hr
For Profit Fee: $40/hr
Rice Training Fee: $16/hr
Non-Profit Training Fee: $25.20/hr
For Profit Training Fee: $80/hr
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
Faculty in Charge:
Rafael Verduzco, rafaelv@rice.edu
DESCRIPTION
The Bruker DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool.
This system can profile surface topography and waviness, as well as roughness, to the nanometer range.
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses with the 3D Mapping option.
The stylus force range is from 1 mg to 15 mg which allows profiling on soft or hard surfaces. The system uses a standard stylus with 12.5 um radius.
More information about the Cleanroom can be found here.