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Nanofab Cleanroom: Dektak XT Stylus Profilometer

Nanofab Cleanroom: Dektak XT Stylus Profilometer

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $8/hr

Non-Profit Fee: $12.60/hr

For Profit Fee: $40/hr

Rice Training Fee: $16/hr

Non-Profit Training Fee: $25.20/hr

For Profit Training Fee: $80/hr

CONTACTS

Training Contact:

Tim Gilheart, gilheart@rice.edu

Jing Guo, jg78@rice.edu

James Kerwin, jtk1@rice.edu

 

Faculty in Charge:

Rafael Verduzco, rafaelv@rice.edu

DESCRIPTION

The Bruker DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool.
This system can profile surface topography and waviness, as well as roughness, to the nanometer range.
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses with the 3D Mapping option.
The stylus force range is from 1 mg to 15 mg which allows profiling on soft or hard surfaces. The system uses a standard stylus with 12.5 um radius.

More information about the Cleanroom can be found here.