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Nanofab Cleanroom: Elionix Ebeam Lithography System

Nanofab Cleanroom: Elionix Ebeam Lithography System

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $60/hr

Non-Profit Fee: $94/hr

For Profit Fee: $300/hr

Rice Training Fee: $120/hr

Non-Profit Training Fee: $188/hr

For Profit Training Fee: $545/hr

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

 

DESCRIPTION

The Elionix ELS-G100 is a high speed, ultra high precision thermal field emission (TFE) electron beam lithography system.
It generates patterns with a line width of 7nm. The system can maintain stable 1.8nm electron beam at 100kV.
It is equipped with pieces holder and up to 6” wafer holder.
The pre-alignment station can measure the stage coordinates for alignment pattern printing. More information about the Cleanroom can be found here.