Nanofab Cleanroom: Elionix Ebeam Lithography System
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $60/hr
Non-Profit Fee: $94/hr
For Profit Fee: $300/hr
Rice Training Fee: $120/hr
Non-Profit Training Fee: $188/hr
For Profit Training Fee: $545/hr
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
DESCRIPTION
The Elionix ELS-G100 is a high speed, ultra high precision thermal field emission (TFE) electron beam lithography system.
It generates patterns with a line width of 7nm. The system can maintain stable 1.8nm electron beam at 100kV.
It is equipped with pieces holder and up to 6” wafer holder.
The pre-alignment station can measure the stage coordinates for alignment pattern printing. More information about the Cleanroom can be found here.