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Nanofab Cleanroom: FEI Apreo SEM

Nanofab Cleanroom: FEI Apreo SEM

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $40/hr

Non-Profit Fee: $62.75/hr

For Profit Fee: $200/hr

Rice Training Fee: $80/hr

Non-Profit Training Fee: $125.50/hr

For Profit Training Fee: $320/hr

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

 

DESCRIPTION

The Apreo is a Scanning Electron Microscope (SEM) that produces enlarged images of a variety of specimens, achieving magnification over 100,000X.

The resolution is about 1 nm.

In-lens backscatter detector provides excellent materials contrast, even at tilt.

The low vacuum mode has  a 500 Pa maximum chamber pressure for imaging even the most demanding insulators.

The system also combines with X-ray microanalysis (EDX). The chamber is equipped with an 110X110mm stage and one wafer stage. More information about the Cleanroom can be found here.