Nanofab Cleanroom: FEI Apreo SEM
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $40/hr
Non-Profit Fee: $62.75/hr
For Profit Fee: $200/hr
Rice Training Fee: $80/hr
Non-Profit Training Fee: $125.50/hr
For Profit Training Fee: $320/hr
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
DESCRIPTION
The Apreo is a Scanning Electron Microscope (SEM) that produces enlarged images of a variety of specimens, achieving magnification over 100,000X. The resolution is about 1 nm. In-lens backscatter detector provides excellent materials contrast, even at tilt. The low vacuum mode has a 500 Pa maximum chamber pressure for imaging even the most demanding insulators. The system also combines with X-ray microanalysis (EDX). The chamber is equipped with an 110X110mm stage and one wafer stage. More information about the Cleanroom can be found here.