The Jandell RM3 4-point probe is an instrument used to measure sheet resistance. The instrument combines a fixed geometry four point probe fixture with a constant current source and digital voltmeter for sheet resistance and voltage measurements. 

The probe fixture can accommodate samples as small as 5mm x 5mm all the way up to full wafers, with thickness up to 1mm. The probe tips are made of tungsten carbide with tip radii of 50μm and spacing of 1mm. The tool is suitable for solid films for which the tungsten carbide tips can make an ohmic contact.

This tool does not require reservations, and is included in daily cleanroom access.