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LL Evaporator

Nanofab CR Load-locked Ebeam Evaporator

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $15/hr

Non-Profit Fee: $23.50/hr

For Profit Fee: $75/hr

Rice Training Fee: $30/hr

Non-Profit Training Fee: $47/hr

For Profit Training Fee: $150/hr

Rice Consumable Fee: $1.25/ use for PD or AU

Non-profit Consumable Fee: $1.95/ use for PD or AU

For Profit Consumable Fee: $6.25/ use for PD or AU

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

 

DESCRIPTION

The Kurt J. Lesker Company® PRO Line PVD 75 is the next generation thin film deposition system based on the workhorse PVD 75 platform. The PRO Line PVD 75 builds on the successes of the original design with improved system base pressures and pump down times. Our PVD 75 is an E-beam evaporator equipped with a load-lock connected to the main process chamber. The e-beam evaporation sources allow 6 pockets of 20cc crucible liners. The control software (eKlipse) has  the advanced programming capability for automatic substrate loading/unloading and numerous features for optimized thin film deposition recipes. RNF provides evaporation materials for standard depositions: Ti, Au, Cr, Al, Ag, Pd. We charge the system by hourly rate plus the consumable fee for precious metals (Au, Pd).