Nanofab CR Load-locked Ebeam Evaporator
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $15/hr
Non-Profit Fee: $23.50/hr
For Profit Fee: $75/hr
Rice Training Fee: $30/hr
Non-Profit Training Fee: $47/hr
For Profit Training Fee: $150/hr
Rice Consumable Fee: $1.25/ use for PD or AU
Non-profit Consumable Fee: $1.95/ use for PD or AU
For Profit Consumable Fee: $6.25/ use for PD or AU
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
DESCRIPTION
The Kurt J. Lesker Company® PRO Line PVD 75 is the next generation thin film deposition system based on the workhorse PVD 75 platform. The PRO Line PVD 75 builds on the successes of the original design with improved system base pressures and pump down times. Our PVD 75 is an E-beam evaporator equipped with a load-lock connected to the main process chamber. The e-beam evaporation sources allow 6 pockets of 20cc crucible liners. The control software (eKlipse) has the advanced programming capability for automatic substrate loading/unloading and numerous features for optimized thin film deposition recipes. RNF provides evaporation materials for standard depositions: Ti, Au, Cr, Al, Ag, Pd. We charge the system by hourly rate plus the consumable fee for precious metals (Au, Pd).