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Nanofab Cleanroom: Maskless Photolithography System

Nanofab Cleanroom: Maskless Photolithography System

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $20/hr

Non-Profit Fee: $31.30/hr

For Profit Fee: $100/hr

Rice Training Fee: $40/hr

Non-Profit Training Fee: $62.60/hr

For Profit Training Fee: $200/hr

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

 

Faculty in Charge:

Rafael Verduzco, rafaelv@rice.edu

DESCRIPTION

Bruker (formerly Rave NP) SF-100 Lightning

 

The SF-100 Lightning is a fast and flexible maskless lithography system which can reach submicron resolution. The system is equipped with high power LED light sources at 365nm, 385nm, and 405nm, ensuring compatibility with most commercial photoresists. It provide rapid prototype of new designs and ideas without costly photomasks. It can also expose features over the entire area of the stage movement. There is a integrated CCD camera for live viewing, supporting auto focus and level-to-level alignment. Fully automated XYZ stage provides 1 button operation and auto stitching for large substrates. Thick resist can also be processed in single exposure step without the need for complicated slow Z stage movement.

More information about the Cleanroom can be found here.