Nanofab Cleanroom: NP Flex Optical Profilometer
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $15/hr
Non-Profit Fee: $23.50/hr
For Profit Fee: $75/hr
Rice Training Fee: $30/hr
Non-Profit Training Fee: $47/hr
For Profit Training Fee: $150/hr
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
Faculty in Charge:
Rafael Verduzco, rafaelv@rice.edu
DESCRIPTION
NPFLEX optical profiler The NPFLEX is a lateral, vertical and angular optical profiling system that measures and analyzes the surface of wafers and other flat substrates (up to 12”), the topographies of large industrial parts such as engine blocks, and the surfaces of many other types of samples. The NPFLEX system performs extremely precise and accurate non-contact 3D surface measurements. Software can extend measurement capability to large areas by automatically stitching overlapping scans. Vertical resolution can reach 1A. Horizontal resolution in is 0.33um. The field-of-view is 7.68 x 5.76 mm. Larger scan areas will be automatically stitched. More information about the Cleanroom can be found here.