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Nanofab Cleanroom: Plasma Cleaner

Nanofab Cleanroom: Plasma Cleaner

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $10/hr

Non-Profit Fee: $15.65/hr

For Profit Fee: $50/hr

Rice Training Fee: $20/hr

Non-Profit Training Fee: $31.30/hr

For Profit Training Fee: $170/hr

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

Faculty in Charge:

Rafael Verduzco (rafaelv@rice.edu)

DESCRIPTION

USAGE OF THIS INSTRUMENT IS NOW LOGGED EXCLUSIVELY THROUGH FOM: https://fom.rice.edu/fom/
The plasma cleaner not reservable; it is a walk-up tool. 
This rebuilt SuperPlasmod 300 features a 300 W power supply, oxygen and argon process gases, and auto-tuning of the matching network.
In addition to plasma cleaning applications, it sees some use as an etching tool for processes where the anisotropy of an RIE process would be undesirable.

More information about the Cleanroom can be found here.