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Nanofab Cleanroom: Rapid Thermal Processor (RTP)

Nanofab Cleanroom: Rapid Thermal Processor (RTP)

LOCATION

Cleanroom (Space Science basement 06)

PRICING

Rice User Fee: $20/hr

Non-Profit Fee: $31.30/hr

For Profit Fee: $100/hr

Rice Training Fee: $40/hr

Non-Profit Training Fee: $62.60/hr

For Profit Training Fee: $200/hr

CONTACTS

Training Contact:

Jing Guo, jg78@rice.edu

Carlos Gramajo, cg70@rice.edu

Nadia Pervez, np65@rice.edu

 

Faculty in Charge:

Rafael Verduzco, rafaelv@rice.edu

DESCRIPTION

Allwin 21 AccuThermo AW610 is a rapid thermal processing (RTP) system which uses high intensity visible radiation to heat single wafers (up tp 6”) for short process periods of time at precisely controlled temperatures.

The highest process temperature is 1150C. The system can ramp up rapidly (up to 50 C/s). The process periods are typically 1-600 seconds.

The system has closed-loop temperature control with pyrometer or thermocouple (TC) temperature sensing.

It is equipped with Ar, N2 and forming gas (4% H2 in N2) for different application. More information about the Cleanroom can be found here.