Nanofab Cleanroom: Rapid Thermal Processor (RTP)
LOCATION
Cleanroom (Space Science basement 06)
PRICING
Rice User Fee: $20/hr
Non-Profit Fee: $31.30/hr
For Profit Fee: $100/hr
Rice Training Fee: $40/hr
Non-Profit Training Fee: $62.60/hr
For Profit Training Fee: $200/hr
CONTACTS
Training Contact:
Jing Guo, jg78@rice.edu
Carlos Gramajo, cg70@rice.edu
Nadia Pervez, np65@rice.edu
Faculty in Charge:
Rafael Verduzco, rafaelv@rice.edu
DESCRIPTION
Allwin 21 AccuThermo AW610 is a rapid thermal processing (RTP) system which uses high intensity visible radiation to heat single wafers (up tp 6”) for short process periods of time at precisely controlled temperatures. The highest process temperature is 1150C. The system can ramp up rapidly (up to 50 C/s). The process periods are typically 1-600 seconds. The system has closed-loop temperature control with pyrometer or thermocouple (TC) temperature sensing. It is equipped with Ar, N2 and forming gas (4% H2 in N2) for different application. More information about the Cleanroom can be found here.