The ellipsometers are not reservable; they are walk-up tools and are included in the basic cleanroom access fee.
This compact thin film analyzer from Filmetrics features easy-to-use software (currently hosted on the ALDS control computer), and a fiber-coupled probe to facilitate robust alignment normal to the sample. It measures the spectrum from UV to near-IR. 
In addition to the standard probe with a spot size of several mm, a small-spot (< 1 mm) probe is available for applications that require it. Due to the delicate nature of the small-spot fiber, it is not left out for general use, so you must contact the cleanroom manager to receive access to it, should your measurements require it. More information about the Cleanroom can be found here.