EMC Plasma Cleaner
LOCATION
Brockman B05
PRICING
Rice User Fee: $16/hr
Non-Profit Fee: $25/hr
For Profit Fee: $80/hr
Rice Training Fee: $32/hr
Non-Profit Training Fee: $50/hr
For Profit Training Fee: $160/hr
CONTACTS
Training Contact:
Dr. Hua Guo - hua.guo@rice.edu
Dr. Wenhua Guo - whguo@rice.edu
DESCRIPTION
This plasma cleaner (Model 1020) is equipped with high frequency (13.56 MHz) oscillating field system coupled to a quartz and stainless-steel plasma chamber, Ion energies less than 12 eV. It is compatible with all kinds of TEM specimen holders for transmission electron microscopes.
Cleans specimens immediately before they are inserted into the electron microscope. To remove existing carbonaceous debris from materials’ surface and prevent contamination from occurring during imaging and analysis.
The vacuum system is with oil-free turbomolecular drag pump and a multistage diaphragm pump Ultimate vacuum of 1 x 10 -7 mbar. Gas type: 20% oxygen and 80% argon, for the flow rate is factory set and can be adjusted via a potentiometer located on the service panel.
