LOCATION
Space Science basement room 20 (cleanroom support lab)
DESCRIPTION
The Tergeo plasma cleaner is a tabletop system for sample cleaning and surface activation. It is equipped with both capacitively coupled and inductively coupled plasma sources with pulsed plasma capability. The adjustable process parameters include RF power, gas flow, and time. Available process gases include O2, Ar, and water vapor.
Powder samples are not allowed in this tool.